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advanced sub-10 nm feature patterning(1)
advanced thin film reaction engineering design(1)
agent(1)
ald nucleation(1)
ald-compatible metal precursor(1)
ald-nucleation model(1)
atomic layer deposition(1)
available metal precursor(1)
coupling deposition(1)
metal ald(1)
metal ald nucleation(1)
metal oxide(1)
metalloid thin film(1)
new nanoscale elemental metal(1)
novel metal precursor(1)
nucleation reversibility(1)
steady-state metal ald reaction(1)
substrate-dependent nucleation(1)
thermal atomic layer deposition(1)
thermal atomic layer etching(1)
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